4th edition Fabrication Engineering at the Micro- and Nanoscale
A detailed list of corrections for the 4th edition is available from Author Profile: fabrication engineering at the micro- and nanoscale 4th pdf
Self-assembly & bottom-up techniques
A must-own for the bookshelf, but don't treat it as the final word on modern sub-10nm manufacturing. 4th edition Fabrication Engineering at the Micro- and
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